MEASUREMENTS OF SPATIAL AND TEMPORAL SHEATH EVOLUTION FOR SPHERICAL AND CYLINDRICAL GEOMETRIES IN PLASMA SOURCE ION-IMPLANTATION

被引:98
作者
SHAMIM, M
SCHEUER, JT
CONRAD, JR
机构
[1] Plasma Source Ion Implantation Group, University of Wisconsin, Madison, WI 53706
关键词
D O I
10.1063/1.348600
中图分类号
O59 [应用物理学];
学科分类号
摘要
A comparison of experimental measurements and numerical calculations of temporal and spatial sheath evolution is presented. Spherical targets of copper and stainless steel (radius = 2 cm) and a cylindrical target (radius = 0.95 cm, height = 18 cm) were immersed in an argon plasma with plasma densities of 2 x 10(8)-8 x 10(9) cm-3 and biased negatively (20-50 kV). A Langmuir probe was used to detect the propagating sheath edge. Experimental measurements of sheath edge position were in good agreement with those determined by numerical calculations.
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页码:2904 / 2908
页数:5
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