BACKSCATTERING FACTOR IN AUGER-ELECTRON SPECTROSCOPY

The backscattering factor in quantitative AES analysis should indicate what is the effect of backscattering on the recorded Auger electron signal. For this reason, in the present work the backscattering factor is defined as the ratio of the Auger electron current, recorded by the analyzer, to the current that would be recorded in the case of no backscattering. The Monte Carlo method was used in the calculations of the backscattering factor so defined, and also, in the calculations of the backscattering factor whose usual definition is based on the angular and energy distribution of electrons leaving the solid. Calculations were carried out for KLL Auger transition of carbon, magnesium, aluminum, and silicon. The primary energy dependence of both backscattering factors practically coincide except for the region in the vicinity of the ionization energy. The dependence of the backscattering factor on the primary beam incidence angle was also determined in this work. The backscattering factor was found to vary significantly with the incidence angle having maximum at 60-80° with respect to the surface normal. This maximum moves toward larger angles with the increase of the incident electron energy. © 1979.