EFFECT OF ROTATION REVERSAL DURING CZOCHRALSKI CRYSTAL GROWTH

被引：1

作者：

CHEDZEY, HA

ROBERTSO.DS

机构：

[1] Royal Radar Establishment, Malvern, Worcs.

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1969年 / 2卷 / 08期

关键词：

D O I：

10.1088/0022-3727/2/8/413

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The effects of reversing the direction of rotation of the crystal during growth from the melt are described. It is shown that the procedure produces a change in impurity incorporation.

引用

页码：1157 / &