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EFFECTS OF ABSORBED ARGON ON ELECTRICAL PROPERTIES OF THIN COPPER FILMS

被引：11
作者：
WILSON, GW
SINHA, BP
机构：
来源：
THIN SOLID FILMS | 1971年 / 8卷 / 03期
关键词：
D O I：
10.1016/0040-6090(71)90109-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：207 / &
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