ATOMICALLY CLEAN SURFACES BY PULSED LASER BOMBARDMENT

被引：83

作者：

BEDAIR, SM

SMITH, HP

机构：

[1] Space Sciences Laboratory, Department of Nuclear Engineering, University of California, Berkeley

来源：

JOURNAL OF APPLIED PHYSICS | 1969年 / 40卷 / 12期

关键词：

D O I：

10.1063/1.1657288

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

It is shown that high power, Q-spoiled lasers offer an interesting method for obtaining clean surfaces in vacuum. However, complete removal of oxygen and sulfur contamination from nickel surfaces by laser bombardment at 100 MW/cm 2 produced irreparable surface damage that is attributed to filamentizing of the laser beam and/or to nonuniform surface reflectivity. On the other hand, application of the technique at 30 MW/cm2 successfully removed the (7×7) satellite structure from (111) silicon surfaces without surface damage. © 1969 The American Institute of Physics.

引用

页码：4776 / &

共 16 条

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