GAMMA-SPECTROMETRIC AND RADIOCHEMICAL ANALYSIS FOR IMPURITIES IN ULTRAPURE SILICON

被引:37
作者
THOMPSON, BA
STRAUSE, BM
LEBOEUF, MB
机构
关键词
D O I
10.1021/ac60138a003
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
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页码:1023 / 1027
页数:5
相关论文
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