RECENT INSTRUMENTAL DEVELOPMENTS IN SURFACE AND THIN-FILM ANALYSIS BY ELECTRON AND MASS-SPECTROMETRIC TECHNIQUES

Recent instrumental and methodical progress with electron and mass spectrometric techniques for practical surface and depth profile analysis is discussed. In particular, work function measurements in a microprobe mode and in conjunction with sputter depth profiling are shown to constitute a useful supplemental method which can be readily incorporated into existing scanning Auger microprobes. The applicability of secondary neutral mass spectrometry SNMS based on electron gas postionization has been expanded by a novel high-frequency mode which enables analysis of dielectric sample structures by low-energy noble-gas ion bombardment with the same conditions as for electrically conducting samples. This new operation mode of SNMS is shown to provide attractive features for high-resolution depth profiling of inhomogeneous conducting samples, too. Finally, the potentialities of secondary neutral microprobes based on laser and electron impact postionization are addressed. A first example for surface imaging with a recently developed prototype of a secondary neutral microprobe based on electron-gas SNMS is given.