MICROSTRUCTURAL CONTROL OF DIAMOND THIN-FILMS BY MICROLITHOGRAPHIC PATTERNING

被引：18

作者：

DENATALE, JF

FLINTOFF, JF

HARKER, AB

机构：

[1] Rockwell International Science Center, Thousand Oaks

来源：

JOURNAL OF APPLIED PHYSICS | 1990年 / 68卷 / 08期

关键词：

D O I：

10.1063/1.346237

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Microlithographic patterning has been used to elucidate the mechanisms controlling diamond film nucleation and grain growth. The approach is capable of establishing a degree of control over diamond nucleation on the substrate, which can be used to improve film uniformity and enhance fine grained microstructure. The observed microstructures in the patterned films are consistent with an intrinsic growth mechanism based upon defect-initiated renucleation.

引用

页码：4014 / 4019

页数：6

共 13 条

[1] BACHMANN PK, 1988, DIAMOND DIAMOND LIKE, P99
[2] CRYSTALLIZATION OF DIAMOND CRYSTALS AND FILMS BY MICROWAVE ASSISTED CVD .2.
BADZIAN, AR
BADZIAN, T
ROY, R
MESSIER, R
SPEAR, KE
[J]. MATERIALS RESEARCH BULLETIN, 1988, 23 (04) : 531 - 548
[3] DIAO H, 1989, DIAMOND LOW RESISTAN
[4] FENG T, 1989, SPIE, V1146, P159
[5] GROWTH OF TEXTURED DIAMOND FILMS ON FOREIGN SUBSTRATES FROM ATTACHED SEED CRYSTALS
GEIS, MW
[J]. APPLIED PHYSICS LETTERS, 1989, 55 (06) : 550 - 552
[6] HARKER AB, 1990, RES DEV, V32, P84
[7] HARKER AB, 1990, IN PRESS JUL SPIE M
[8] HARKER AB, 1990, J MATER RES APR
[9] DIAMOND SYNTHESIS FROM GAS-PHASE IN MICROWAVE PLASMA
KAMO, M
SATO, Y
MATSUMOTO, S
SETAKA, N
[J]. JOURNAL OF CRYSTAL GROWTH, 1983, 62 (03) : 642 - 644
[10] FOCUSED ION-BEAM CRATER ARRAYS FOR INDUCED NUCLEATION OF DIAMOND FILM
KIRKPATRICK, AR
WARD, BW
ECONOMOU, NP
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (06): : 1947 - 1949

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