AN ELECTROSTATICALLY ACTUATED GAS VALVE WITH AN S-SHAPED FILM ELEMENT

被引：35

作者：

SATO, K

SHIKIDA, M

机构：

[1] Mechanical Engineering Research Laboratory, Hitachi Ltd, Tsuchiura, lbaraki 300

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1994年 / 4卷 / 04期

关键词：

D O I：

10.1088/0960-1317/4/4/005

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new microvalve actuator driven by electrostatic force is described and shown to be suitable for controlling the flow of a rarefied gas. The actuator consists of a pair of planar electrodes sandwiching a conductive film that has an S-shaped bend in the middle. The S-bend moves back and forth as voltage is alternately applied between each of the electrodes and the film. A manually assembled macromodel actuator having a film 5 mum thick and 12 mm wide is operated between electrodes separated by 2.5 mm. The propagation speed is 4.0 m s-1 at an applied voltage of 150 V. The large vertical displacement of the film enables the large valve seat lift necessary to allow a certain amount of gas flow. An experimental model of the valve allowed at airflow rate of 10 sccm at a pressure of 60 Pa.

引用

页码：205 / 209

页数：5

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