PULSED LASER ETCHING OF HIGH-TC SUPERCONDUCTING FILMS

被引:144
作者
INAM, A [1 ]
WU, XD [1 ]
VENKATESAN, T [1 ]
OGALE, SB [1 ]
CHANG, CC [1 ]
DIJKKAMP, D [1 ]
机构
[1] BELL COMMUN RES INC,RED BANK,NJ 07701
关键词
D O I
10.1063/1.98756
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1112 / 1114
页数:3
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