HIGH-BRIGHTNESS ULTRAVIOLET EXCIMER LASERS

被引：89

作者：

SZATMARI, S

机构：

[1] LASER LAB GOTTINGEN EV,D-37016 GOTTINGEN,GERMANY

[2] HUNGARIAN ACAD SCI,LASER PHYS RES GRP,H-6720 SZEGED,HUNGARY

来源：

APPLIED PHYSICS B-LASERS AND OPTICS | 1994年 / 58卷 / 03期

关键词：

D O I：

10.1007/BF01081313

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

At present the performance of short-pulse rare-gas-halide excimer-laser systems is definitely below that of solid-state systems, as far as the maximum peak-power is concerned. However, short-pulse excimer lasers are expected to be the best candidates to produce the highest focused intensities (I greater than or similar to 10(20) W/cm2) provided by the shorter wavelength and less optical distortion in the gaseous active medium. This is especially feasible if the present performance of short-wavelength focusing optics is improved, and the problem of the limited extraction efficiency of excimers is solved. In this paper the results of former developments, novel methods, such as spatially-evolving chirped-pulse amplification, off-axis amplification, interferometric multiplexing, and some considerations for the achievable maximum brightness of table-top excimer systems are presented.

引用

页码：211 / 223

页数：13

共 110 条

[1] OPTIMIZED OPERATION OF SHORT-PULSE KRF AMPLIFIERS BY OFF-AXIS AMPLIFICATION [J].