CHARACTERISTICS OF BISMUTH LAYERED SRBI2TA2O9 THIN-FILM CAPACITORS AND COMPARISON WITH PB(ZR,TI)O-3

被引:182
作者
MIHARA, T
YOSHIMORI, H
WATANABE, H
DEARAUJO, CAP
机构
[1] UNIV COLORADO,COLORADO SPRINGS,CO 80907
[2] SYMETRIX CORP,COLORADO SPRINGS,CO
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1995年 / 34卷 / 9B期
关键词
FERROELECTRICS; THIN FILM; PZT; BLSF; SRBI2TA2O9; HYSTERESIS LOOP; FATIGUE; RETENTION; SIGNAL NOISE RATIO; LEAKAGE CURRENT; SPACE CHARGE;
D O I
10.1143/JJAP.34.5233
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have developed the series of thin-film bismuth layer structured ferroelectric (BLSF) materials such as SrBi2 Ta2O9, SrBi2Nb2O9, SrBi4Ti4O15 and their solid solutions using metallo-organic-decomposition (MOD) spin-on coating techniques. We found that SrBi2Ta2O9 is one of the best potential candidate materials for ferroelectric nonvolatile memories. The SrBi2Ta2O9 thin-film capacitor had the remanent polarization (P-r+-P-r-) of 20 mu C/cm(2), coercive field of 35 kV/cm and dielectric constant of 250. SrBi2Ta2O9 thin him on platinum electrode has fatigue-free characteristics for up to 2 x 10(11) cycles without requiring any complicated electrode system such as conductive oxide. Moreover, SrBi2Ta2O9 thin film has many advantages, e.g., high signal/noise ratio of 8 at 1.2 V, low-voltage operation at as low as 1 V, long data-retention, little surface effect, superior imprint properties and low leakage current. We considered that these advantages are due to (1) less space Charge and (2) the inherent domain motion.
引用
收藏
页码:5233 / 5239
页数:7
相关论文
共 21 条
  • [1] Desu S. B., 1993, Integrated Ferroelectrics, V3, P365, DOI 10.1080/10584589308216692
  • [2] FATIGUE AND SWITCHING IN FERROELECTRIC MEMORIES - THEORY AND EXPERIMENT
    DUIKER, HM
    BEALE, PD
    SCOTT, JF
    DEARAUJO, CAP
    MELNICK, BM
    CUCHIARO, JD
    MCMILLAN, LD
    [J]. JOURNAL OF APPLIED PHYSICS, 1990, 68 (11) : 5783 - 5791
  • [3] Hadnagy T. D., 1994, Integrated Ferroelectrics, V4, P217, DOI 10.1080/10584589408017024
  • [4] KAKIMI A, 1994, JPN J APPL PHYS, V32, pL1707
  • [5] CHARACTERISTIC CHANGE DUE TO POLARIZATION FATIGUE OF SOL-GEL FERROELECTRIC PB(ZR0.4TI0.6)O-3 THIN-FILM CAPACITORS
    MIHARA, T
    WATANABE, H
    DEARAUJO, CAP
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (9B): : 5281 - 5286
  • [6] ORIGIN OF DEPOLARIZATION IN SOL-GEL FERROELECTRIC PB(ZR0.4TI0.6)O-3 THIN-FILM CAPACITORS
    MIHARA, T
    YOSHIMORI, H
    WATANABE, H
    DEARAUJO, CAP
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1994, 33 (12A): : L1703 - L1706
  • [7] POLARIZATION FATIGUE CHARACTERISTICS OF SOL-GEL FERROELECTRIC PB(ZR0.4TI0.6)O3 THIN-FILM CAPACITORS
    MIHARA, T
    WATANABE, H
    DEARAUJO, CAP
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (7A): : 3996 - 4002
  • [8] EVALUATION OF IMPRINT PROPERTIES IN SOL-GEL FERROELECTRIC PB(ZRTI)O3 THIN-FILM CAPACITORS
    MIHARA, T
    WATANABE, H
    DEARAUJO, CAP
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9B): : 4168 - 4174
  • [9] MIHARA T, 1995, IN PRESS 6TH P INT S
  • [10] MIHARA T, 1992, 4TH P INT S INT FERR, P137