GAINO3 - A NEW TRANSPARENT CONDUCTING OXIDE

被引:89
作者
CAVA, RJ
PHILLIPS, JM
KWO, J
THOMAS, GA
VANDOVER, RB
CARTER, SA
KRAJEWSKI, JJ
PECK, WF
MARSHALL, JH
RAPKINE, DH
机构
[1] ATandT Bell Laboratories, Murray Hill
关键词
D O I
10.1063/1.111686
中图分类号
O59 [应用物理学];
学科分类号
摘要
GaInO3, a layered material with the beta Ga2O3 crystal structure, can be doped with electrons through the introduction of oxygen deficiency, Sn doping for In, or Ge doping for Ga. At atomic doping levels of 10% or less, resistivities as low as 3 mOMEGA cm are obtained. In contrast to polycrystalline indium tin oxide (ITO), which is distinctly green, conductive gallium indium oxide is light grey with no visible coloration. Thin films of doped GaInO3 display good transparency over the whole optical window, superior to that of ITO in the green-blue region.
引用
收藏
页码:2071 / 2072
页数:2
相关论文
共 6 条
  • [1] PREPARATION AND PHYSICAL-PROPERTIES OF TRANSPARENT CONDUCTING OXIDE-FILMS
    JARZEBSKI, ZM
    [J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1982, 71 (01): : 13 - 41
  • [2] Phillips J. D., UNPUB
  • [3] SYNTHESIS AND STRUCTURE OF PHASES IN IN2O3-GA2O3 SYSTEM
    SHANNON, RD
    PREWITT, CT
    [J]. JOURNAL OF INORGANIC & NUCLEAR CHEMISTRY, 1968, 30 (06): : 1389 - &
  • [4] Thomas GWC, UNPUB
  • [5] NEW OXIDE PHASE WITH WIDE BAND-GAP AND HIGH ELECTROCONDUCTIVITY, MGIN2O4
    UEDA, N
    OMATA, T
    HIKUMA, N
    UEDA, K
    MIZOGUCHI, H
    HASHIMOTO, T
    KAWAZOE, H
    [J]. APPLIED PHYSICS LETTERS, 1992, 61 (16) : 1954 - 1955
  • [6] UEDA N, 1993, APPL PHYS LETT, V62, P499