DIAGNOSTIC METHODS FOR SPUTTERING PLASMAS

被引：82

作者：

THORNTON, JA

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 02期

关键词：

D O I：

10.1116/1.569452

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：188 / 192

页数：5

共 79 条

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[8] DEEXCITATION OF AR-P-3(2),P-3(1), AND P-1(1) STATES IN PURE ARGON AND IN AR-H2 OR AR-CO MIXTURES [J].

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[10]

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