SURFACE-ROUGHNESS MEASUREMENT USING FOURIER TRANSFORMATION OF DOUBLY SCATTERED SPECKLE PATTERN

被引：15

作者：

NAKAGAWA, K

YOSHIMURA, T

MINEMOTO, T

机构：

[1] Department of Instrumentation Engineering, Faculty of Engineering, Kobe University, Kobe, 657, Rokkodai, Nadaku

来源：

APPLIED OPTICS | 1993年 / 32卷 / 25期

关键词：

SURFACE-ROUGHNESS MEASUREMENT; SPECKLE PATTERN; FOURIER TRANSFORMATION;

D O I：

10.1364/AO.32.004898

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The statistical properties of the doubly scattered speckle pattern generated from a rough surface, under a fully developed and static speckle pattern illumination, have been investigated by numerical analysis. The real-time Fourier transformation of the doubly scattered speckle pattern by an optical process enables us to measure the surface roughness in quasi real time.

引用

页码：4898 / 4903

页数：6

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