ELECTRON-ENERGY DISTRIBUTION AND TRANSPORT-COEFFICIENTS OF ELECTRON SWARMS IN SF6 AND NITROGEN MIXTURES

被引:23
作者
ITOH, H
OHMORI, Y
KAWAGUCHI, M
MIURA, Y
NAKAO, Y
TAGASHIRA, H
机构
[1] MURORAN INST TECHNOL,DEPT ELECT ENGN,MURORAN,HOKKAIDO 050,JAPAN
[2] HOKKAIDO POLYTECH COLL,DEPT ELECT ENGN,OTARU 04702,JAPAN
[3] HOKKAIDO UNIV,DEPT ELECT ENGN,SAPPORO,HOKKAIDO 060,JAPAN
关键词
D O I
10.1088/0022-3727/23/4/004
中图分类号
O59 [应用物理学];
学科分类号
摘要
Electron swarm behaviour in SF6 and nitrogen mixtures is analysed over the E/N range from 141 to 707 Td by a three-term Boltzmann equation method. A set of electron collision cross sections, which was determined consistently with measurements for the respective pure gases by the authors ((SF6, Itoh et al., 1988); N2(Ohmori et al., 1988)), is used. The calculation is carried out for the steady-state Townsend (SST), pulsed Townsend (PT) and time-of-flight (TOF) experiments. In particular the TOF parameters of these mixtures are deduced for the first time as far as the authors are aware. It is found that the calculated values of the effective ionisation coefficient alpha shows a monotonic variation with percentage of SF6 at a fixed E/N, the same as previous measurements. The E/N value at which alpha =0, i.e. the limiting E/N, is also deduced and in close agreement with measurements. The variations of the electron energy distribution and other transport coefficients with the partial SF6 pressure are calculated and discussed in detail. © 1990 IOP Publishing Ltd.
引用
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页码:415 / 421
页数:7
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