PREPARATION AND BASIC PROPERTIES OF BATIO3-BAPBO3 MULTILAYER THIN-FILMS BY METAL-ALKOXIDES METHOD

被引：16

作者：

AZUMA, T

TAKAHASHI, S

KUWABARA, M

机构：

[1] Department of Applied Chemistry, Kyushu Institute of Technology, Tobata, Kitakyushu

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 9B期

关键词：

BARIUM TITANATE THIN FILM; BARIUM METAPLUMBATE THIN FILM; LEAD TITANATE THIN FILM; MULTILAYER THIN FILM; METAL-ALKOXIDES METHOD; CRYSTAL ORIENTATION; DIELECTRIC PROPERTY;

D O I：

10.1143/JJAP.32.4089

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Preferentially oriented barium titanate (BTO)-barium metaplumbate (BPO) multilayer thin films were prepared by the metal-alkoxides method on MgO single crystals. The BPO layer is an electrode for the BTO layer. Thin films were deposited on cleaved MgO (100) substrates by spin coating. A BTO film of 0.4 mum thickness on the BPO layer shows a dielectric constant of about 400 at room temperature. No formation of reaction phases between BTO and BPO, fired at 800-degrees-C to yield a well-crystallized BTO film, was detected in X-ray diffraction analysis.

引用

页码：4089 / 4091

页数：3