OPERATIONAL CHARACTERISTIC OF A COMPACT MICROWAVE ION-SOURCE

被引：6

作者：

WALTHER, SR

LEUNG, KN

机构：

[1] Lawrence Berkeley Lab, Berkeley, CA,, USA, Lawrence Berkeley Lab, Berkeley, CA, USA

来源：

VACUUM | 1986年 / 36卷 / 11-12期

关键词：

ION BEAMS - MICROWAVE DEVICES - OXYGEN;

D O I：

10.1016/0042-207X(86)90129-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A small microwave ion source has been fabricated from a quartz with one end enclosed by a two-grid accelerator. The source is also enclosed by a cavity operated at a frequency of 2. 45 GHz. Microwave power as high as 500 w can be coupled to the source plasma. The source has been operated with different geometries and for various gases in a cw mode. For hydrogen, ion current density of 200 mA cm** minus **2 with atomic ion species concentration as high as 80% has been extracted from the source. It has also been demonstrated that low energy oxygen ion beams (5-10 ev) can also be extracted from the source.

引用

页码：869 / 871

页数：3