OPTICAL AND ELECTRICAL-PROPERTIES OF ZNO FILMS PREPARED BY SPRAY PYROLYSIS FOR SOLAR-CELL APPLICATIONS

被引:281
作者
ARANOVICH, J
ORTIZ, A
BUBE, RH
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 04期
关键词
D O I
10.1116/1.570167
中图分类号
O59 [应用物理学];
学科分类号
摘要
Zinc oxide films have been produced by spray pyrolysis starting with aqueous solutions of ZnCl//2, ZnCl//2 plus H//2O//2, and Zn acetate, and structural, optical, electrical, and thermoelectrical properties of the deposited films were investigated. Highly transparent films with resistivity as low as 10** minus **3 OMEGA cm were produced by suitable control of deposition procedures and by postdeposition annealing in design.
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页码:994 / 1003
页数:10
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