STUDIES OF CHEMI-LUMINESCENCE ACCOMPANYING FLUORINE ATOM ETCHING OF SILICON

[1] SPECTROSCOPIC STUDIES OF THE REACTIONS SI+F2, SIH4+F2, AND SID4+F2 [J]. JOURNAL OF CHEMICAL PHYSICS, 1979, 71 (06) : 2433 - 2440

[2] BEENAKKER CWJ, COMMUNICATION

[3] BERSIN RL, COMMUNICATION

[4] BOYD H, 1979, SOLID STATE TECHNOL, V22, P133

[5] BOYD H, TB151 MATH CO MATH T

[6] BROWN HL, 1978, SOLID STATE TECHNOL, V21, P35

[7] BUNYARD GB, 1977, SOLID STATE TECHNOL, V20, P53

[8] Chase M.W., 1974, J PHYS CHEM REF DATA, V3, P311

[9] JANAF THERMOCHEMICAL TABLES, 1978 SUPPLEMENT [J]. JOURNAL OF PHYSICAL AND CHEMICAL REFERENCE DATA, 1978, 7 (03) : 793 - 940

[10] INFRARED CHEMI-LUMINESCENCE FROM XEF2-SILICON-SURFACE REACTIONS [J]. PHYSICAL REVIEW LETTERS, 1979, 42 (12) : 815 - 817

[1] SPECTROSCOPIC STUDIES OF THE REACTIONS SI+F2, SIH4+F2, AND SID4+F2 [J]. JOURNAL OF CHEMICAL PHYSICS, 1979, 71 (06) : 2433 - 2440

[2] BEENAKKER CWJ, COMMUNICATION

[3] BERSIN RL, COMMUNICATION

[4] BOYD H, 1979, SOLID STATE TECHNOL, V22, P133

[5] BOYD H, TB151 MATH CO MATH T

[6] BROWN HL, 1978, SOLID STATE TECHNOL, V21, P35

[7] BUNYARD GB, 1977, SOLID STATE TECHNOL, V20, P53

[8] Chase M.W., 1974, J PHYS CHEM REF DATA, V3, P311

[9] JANAF THERMOCHEMICAL TABLES, 1978 SUPPLEMENT [J]. JOURNAL OF PHYSICAL AND CHEMICAL REFERENCE DATA, 1978, 7 (03) : 793 - 940

[10] INFRARED CHEMI-LUMINESCENCE FROM XEF2-SILICON-SURFACE REACTIONS [J]. PHYSICAL REVIEW LETTERS, 1979, 42 (12) : 815 - 817