PRODUCTION OF SILICON-NITRIDE BY GAS NITRIDATION OF ULTRA-FINE SILICON POWDER

被引:15
作者
ISHIZAKI, K
YUMOTO, S
TANAKA, K
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关键词
D O I
10.1007/BF01115725
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:1813 / 1816
页数:4
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