AN INVESTIGATION OF EVAPORATION PROCESS OF DIELECTRIC MATERIALS

被引:36
作者
PULKER, HK
JUNG, E
机构
[1] Balzers AG für Hochvakuumtechnik und Dünne Schichten, Balzers
[2] Physikal.-Chem. Institut der Universität Innsbruck, Innsbruck
关键词
D O I
10.1016/0040-6090(69)90038-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Processes which take place during the evaporation and condensation of magnesium fluoride, cryolite and zinc sulfide were investigated by application of a mass spectrometer. It was found that MgF2 evaporates practically without decomposition but in the case of cryolite and ZnS dissociation and fractionating occur. In addition, mass spectrometrical results concerning the interactions of the evaporated materials with the residual gas of the vacuum chamber are reported. A preferred sorption of water vapour during the condensation of the fluorides was observed. © 1969.
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页码:219 / &
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