INTERFACE MORPHOLOGICAL INSTABILITY IN CZOCHRALSKI SILICON CRYSTAL-GROWTH FROM HEAVILY SB-DOPED MELT

被引:12
作者
KIM, KM [1 ]
机构
[1] RCA LABS,PRINCETON,NJ 08540
关键词
D O I
10.1149/1.2129159
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
[No abstract available]
引用
收藏
页码:875 / 878
页数:4
相关论文
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