LATTICE MISMATCH ACCOMMODATION AT GESI (111) SI INTERFACES GROWN BY LIQUID-PHASE EPITAXY

被引:26
作者
ERNST, F
PIROUZ, P
BAUSER, E
机构
[1] MAX PLANCK INST FESTKORPERFORSCH,W-7000 STUTTGART,GERMANY
[2] CASE WESTERN RESERVE UNIV,DEPT MAT SCI & ENGN,CLEVELAND,OH 44106
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1992年 / 131卷 / 02期
关键词
D O I
10.1002/pssa.2211310235
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Misfit dislocation networks at relaxed GeSi/{111} Si interfaces grown by liquid phase epitaxy from a Bi-Ge-Si solution are characterized. The misfit dislocations are imaged by high resolution transmission electron microscopy and conventional weak-beam dark-field technique. It turns out that networks of partial rather than complete dislocations accommodate the lattice mismatch between GeSi and Si. The formation of these dislocations is discussed with respect to the particular LPE growth conditions.
引用
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页码:651 / 662
页数:12
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