CWAR+ LASER-INDUCED OXIDATION OF CU LAYERS

被引:6
作者
ANDREW, R
机构
来源
APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY | 1986年 / 41卷 / 04期
关键词
D O I
10.1007/BF00697399
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:205 / 212
页数:8
相关论文
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