CALIBRATION OF A SPINNING ROTOR GAS FRICTION GAUGE AGAINST A FUNDAMENTAL VACUUM PRESSURE STANDARD

被引:82
作者
COMSA, G [1 ]
FREMEREY, JK [1 ]
LINDENAU, B [1 ]
MESSER, G [1 ]
ROHL, P [1 ]
机构
[1] PHYS TECH BUNDESANSTALT BRAUNSCHWEIG, INST BERLIN, D-1000 BERLIN, FED REP GER
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 02期
关键词
D O I
10.1116/1.570531
中图分类号
O59 [应用物理学];
学科分类号
摘要
This study reports the direct calibration of a spinning rotor gas friction gage (RG) against the multiple expansion vacuum pressure standard of the Physikalisch-Technische Bundesanstalt (PTB), Berlin, West Germany, with HE, Ne, Ar, Kr, Xe, CH//4, N//2, and, via a membrane micromanometer, with H//2, O//2, CO, and CO//2. It is shown that in the pressure range 10** minus **5-10** minus **2 mbar (10** minus **7-10** minus **4 Pa) the macroscopic coefficient of tangential momentum transfer between gas molecules and the rotor surface, sigma , is close to unity. The long term reproducibility of the new RG at p greater than 10** minus **5 mbar as observed over two years with long intermediate periods of air exposure is within the limits of the total uncertainty of 1% for the comparison with the PTB standard.
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页码:642 / 644
页数:3
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