MEASUREMENT AND SIMULATION OF FLOATING SUBSTRATE EFFECTS ON THE INTRINSIC GATE CAPACITANCE CHARACTERISTICS OF SOI N-MOSFETS

被引:4
作者
FLANDRE, D
机构
[1] Laboratoire de Microélectronique, Université Catholiquede Louvain, B-1348 Louvain-la-Neuve
关键词
MOSFETS; SIMULATION; SUBSTRATES; MEASUREMENT;
D O I
10.1049/el:19920614
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The theoretical foundation of unique floating substrate effects, which have been observed experimentally, on the intrinsic gate capacitance characteristics in saturation of SOI n-MOSFETs, is clearly established using original two-dimensional numerical device simulations.
引用
收藏
页码:967 / 969
页数:3
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