SIMPLE TECHNOLOGIES FOR FABRICATION OF LOW-LOSS SILICA WAVE-GUIDES

被引：19

作者：

LAI, Q

GU, JS

SMIT, MK

SCHMID, J

MELCHIOR, H

机构：

[1] Institute of Quantum Electronics, Swiss Federal Institute of Technology Zurich

来源：

ELECTRONICS LETTERS | 1992年 / 28卷 / 11期

关键词：

OPTICAL WAVE-GUIDES; GLASS; INTEGRATED OPTICS;

D O I：

10.1049/el:19920635

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A simple and reproducible technology is developed for the fabrication of low-loss silica waveguides on silicon substrates. The guiding layer is formed by changing the Si-O ratio composition of the SiO2 layer. The waveguides can be made to have a good match to either optical fibres or guided-wave devices in III-V compound semiconductors.

引用

页码：1000 / 1001

页数：2

共 7 条

[1] 4-CHANNEL WAVELENGTH DIVISION MULTIPLEXERS AND BANDPASS-FILTERS BASED ON ELLIPTIC BRAGG REFLECTORS [J].