PREPARATION AND PROPERTIES OF DIFFERENT TYPES OF SPUTTERED MOS2 FILMS

被引：101

作者：

BUCK, V ^{[1
]}

机构：

[1] DFVLR,INST TECH PHYS,LUBRICANTS & TRIBOL BRANCH,D-7000 STUTTGART 80,FED REP GER

来源：

关键词：

D O I：

10.1016/0043-1648(87)90116-5

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

引用

页码：263 / 274

页数：12

共 44 条

[1] MORPHOLOGICAL PROPERTIES OF SPUTTERED MOS2 FILMS [J].

BUCK, V .

BUCK, V .

[3]

BUCK V, 1985, ESA SP231 SPEC PUBL, P155

[4] SPUTTERED MOS2 LUBRICANT COATING IMPROVEMENTS [J].

CHRISTY, RI .

[5]

CHRISTY RI, 1979, 6TH P INT C MET COAT, V2, P223

[6]

CHRISTY RI, 1985, COMMUNICATION

[7]

Cotton F. A., 1998, ADV INORG CHEM, V6

[8]

DIMIGEN H, 1979, THIN SOLID FILMS, V64, P221, DOI 10.1016/0040-6090(79)90513-3

[9] STOICHIOMETRY AND FRICTION PROPERTIES OF SPUTTERED MOSX LAYERS [J].

DIMIGEN, H ;

HUBSCH, H ;

WILLICH, P ;

REICHELT, K .

FLEISCHAUER, PD .

ASLE TRANSACTIONS, 1984, 27 (01) :82-88