AN INVESTIGATION OF THE VACUUM UV SPECTRA OF INDUCTIVELY COUPLED RF PLASMAS EXCITED IN INERT-GASES AS A FUNCTION OF SOME OF THE OPERATING PARAMETERS

被引：30

作者：

CLARK, DT

DILKS, A

机构：

来源：

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY | 1980年 / 18卷 / 04期

关键词：

Compendex;

D O I：

10.1002/pol.1980.170180410

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

SPECTROSCOPY, ULTRAVIOLET

引用

收藏

页码：1233 / 1246

页数：14

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