A SIMULATION OF THE TOPOGRAPHIC CONTRAST IN THE SEM

A simulation model is presented to analyze the topographic contast in the scanning electron microscope (SEM). This simulation takes into account all major mechanisms from signal generation to signal detection in the SEM. The calculated result shows that the resolution of the secondary electron image is better than that of the backscattered electron image for 1 and 3 keV primary electrons incident on an Al target. An asymmetric intensity profile of a signal at a topographic pattern, usually found in the SEM equipped with the Everhart-Thornley detector, is mainly due to the asymmetric profile of the backscattered electron signal. © 1990 IOP Publishing Ltd.