DRIFT OF NONLINEARITY IN THE HETERODYNE INTERFEROMETER

被引：45

作者：

HOU, WM

ZHAO, XB

机构：

[1] Swiss Federal Office of Metrology, Wabern

来源：

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1994年 / 16卷 / 01期

关键词：

HETERODYNE INTERFEROMETER; NONLINEARITY; NONLINEARITY DRIFT; LONG-TERM STABILITY; THERMAL PHASE DRIFT; ORTHOGONALITY; POLARIZED BEAM; ELLIPTICITY;

D O I：

10.1016/0141-6359(94)90015-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A more comprehensive theory for the nonlinearity of heterodyne interferometer is given in this article. Our theoretical and experimental investigations of the nonlinearity drift indicates that the stability of the heterodyne interferometers is influenced not only by the thermal drift and long-term stability of the optomechanical parts, but also by the drift of inherent systematic nonlinearity; this drift is of particular importance in interferometer systems that have very small thermal drift. By means of a special detection method, the measurement drift caused by nonlinearity can be separated from the thermal drift and compensated for. Furthermore, a more complete method is devised for heterodyne interferometers to achieve high accuracy and stability.

引用

页码：25 / 35

页数：11

共 4 条

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[2]

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[3]

Hou, Qiu, The influence of the ellipticity of Zeeman laser on the phase measurement of heterodyne interferometers, Acta Metrologica Sinica, 9, pp. 199-202, (1988)

[4]

Rosenbluth, Bobroff, Optical sources of nonlinearity in heterodyne interferometers, Precision Engineering, 12, pp. 7-11, (1990)

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