GROWTH-MECHANISM IN ATOMIC LAYER EPITAXY .3. REEVAPORATION OF CD AND TE FROM CDTE(111) SURFACES AND THICK ELEMENTAL DEPOSITS MONITORED BY QUADRUPOLE-MASS SPECTROMETRY

被引：13

作者：

HERMAN, MA ^{[1
]}

JUZA, P ^{[1
]}

FASCHINGER, W ^{[1
]}

SITTER, H ^{[1
]}

机构：

[1] JOHANNES KEPLER UNIV,INST EXPTL PHYS,A-4040 LINZ,AUSTRIA

来源：

CRYSTAL RESEARCH AND TECHNOLOGY | 1988年 / 23卷 / 03期

关键词：

D O I：

10.1002/crat.2170230304

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：307 / 317

页数：11

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