INVESTIGATION OF LIGHT-SCATTERING FROM ROUGH PERIODIC SURFACES - NUMERICAL-SOLUTIONS

被引:11
作者
FAN, YY
HUYNH, VM
机构
[1] The authors are in the Department of Mechanical Engineering, University of Windsor, Windsor
基金
加拿大自然科学与工程研究理事会;
关键词
LIGHT SCATTERING; REFLECTION; SURFACE ROUGHNESS;
D O I
10.1016/0030-3992(92)90102-8
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The Beckmann scalar scattering model based on the Kirchhoff approximation was used to investigate the scattering of light from periodic surfaces whose roughness amplitude is comparable to, and greater than, the illumination wavelenght. Solutions by numerical integration were obtained for surfaces of different profiles and of different roughnesses. It was found that the scattering patterns from these surfaces were very different at large roughness amplitudes. As the incident angle was varied on a given surface, it was also observed that the intensity of any individual diffraction order oscillated and the degree of oscillation was directly related to roughness. By utilizing this property, a new procedure could be developed for surface roughness assessment.
引用
收藏
页码:145 / 150
页数:6
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