FABRICATION AND CHARACTERIZATION OF INDIUM TIN OXIDE THIN-FILMS FOR ELECTROLUMINESCENT APPLICATIONS

被引：38

作者：

TUETA, R

BRAGUIER, M

机构：

来源：

THIN SOLID FILMS | 1981年 / 80卷 / 1-3期

关键词：

Compendex;

D O I：

10.1016/0040-6090(81)90216-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

INDIUM COMPOUNDS

引用

页码：143 / 148

页数：6

共 10 条

[1] MAGNETRON DC REACTIVE SPUTTERING OF TITANIUM NITRIDE AND INDIUM-TIN OXIDE [J].

CLARKE, PJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01) :141-142

[2] PROPERTIES OF SN-DOPED IN2O3 FILMS PREPARED BY RF SPUTTERING [J].

FAN, JCC ;

BACHNER, FJ .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (12) :1719-1725

[3] HIGHLY CONDUCTIVE, TRANSPARENT FILMS OF SPUTTERED IN2-XSNXO3-Y [J].

FRASER, DB ;

COOK, HD .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (10) :1368-&

[4] LARGE-SCALE SPUTTERING OF INDIUM-TIN OXIDE [J].

GILLERY, FH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02) :306-308

[5] EFFECTS OF HEAT-TREATMENT ON OPTICAL AND ELECTRICAL-PROPERTIES OF INDIUM-TIN OXIDE-FILMS [J].

HAINES, WG ;

BUBE, RH .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (01) :304-307

[6] CHEMICAL VAPOR-DEPOSITION OF TRANSPARENT ELECTRICALLY CONDUCTING LAYERS OF INDIUM OXIDE DOPED WITH TIN [J].

KANE, J ;

SCHWEIZER, HP ;

KERN, W .

THIN SOLID FILMS, 1975, 29 (01) :155-163

[7] PREPARATION AND PROPERTIES OF REACTIVELY CO-SPUTTERED TRANSPARENT CONDUCTING FILMS [J].

LEHMANN, HW ;

WIDMER, R .

THIN SOLID FILMS, 1975, 27 (02) :359-368

[8] EFFICIENT SPRAYED IN2O3-SN N-TYPE SILICON HETEROJUNCTION SOLAR-CELL [J].

MANIFACIER, JC ;

SZEPESSY, L .

APPLIED PHYSICS LETTERS, 1977, 31 (07) :459-462

[9] CHARACTERIZATION OF TRANSPARENT CONDUCTIVE THIN-FILMS OF INDIUM OXIDE [J].

MOLZEN, WW .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01) :99-102

[10]

1970, Patent No. 2110622

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