OPTIMIZATION RESULTS FOR YBACUO FILM SPUTTERING ON POLYCRYSTALLINE ZIRCONIA SUBSTRATES WITH VARIOUS GROWTH AND OXYGENATION CONDITIONS

被引:6
作者
DEGARDIN, A
CARISTAN, E
PECH, T
BENAYADI, Z
MARTIN, JC
KREISLER, A
DOLIN, C
机构
[1] UNIV PARIS 06, SUPELEC, LGEP,CNRS,URA 127, F-91192 GIF SUR YVETTE, FRANCE
[2] LPM, CNRS BELLEVUE, F-92195 MEUDON, FRANCE
[3] UNIV PARIS 11, SUPELEC, LGEP, CNRS, URA 127, F-91192 GIF SUR YVETTE, FRANCE
来源
PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS | 1994年 / 235卷
关键词
D O I
10.1016/0921-4534(94)91558-X
中图分类号
O59 [应用物理学];
学科分类号
摘要
In Situ elaboration of YBaCuO films sputtered on polycrystalline YSZ was studied thanks to a model of reactive sputtering and the in situ measurements of the film resistance during various oxygenation processes.
引用
收藏
页码:669 / 670
页数:2
相关论文
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PECH T, UNPUB J VAC SCI TECH
[2]   INSITU RESISTANCE MEASUREMENTS OF YBACUO THIN-FILMS DURING THE OXYGENATION PROCESS FOR VARIOUS ELABORATION CONDITIONS [J].
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