OPTICAL-HETERODYNE DISPLACEMENT MEASUREMENT USING A FREQUENCY-RAMPED LASER DIODE

被引：20

作者：

IMAI, M

KAWAKITA, K

机构：

[1] Faculty of Engineering, Hokkaido University, Sapporo, Hokkaido

来源：

OPTICS COMMUNICATIONS | 1990年 / 78卷 / 02期

关键词：

D O I：

10.1016/0030-4018(90)90105-3

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We propose a new technique for measuring displacement of an object based on dynamic, optical-heterodyne interferometry using a frequency-modulated laser diode. Vibration amplitudes ranging from 0.26 nm to 5.2 nm at 1 kHz of oscillation frequency are determined with high accuracy. Theoretical treatments explain the principles, and the experiments verify the feasibility of this technique. The available performance of the newly developed system is also discussed in some detail. © 1990.

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页码：113 / 117

页数：5

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