INFRARED STUDIES OF EXCHANGE AND PYROLYSIS REACTIONS IN MIXTURES OF TRIMETHYLAMINE ALANE AND TRIMETHYLGALLIUM

被引：31

作者：

GRADY, AS ^{[1
]}

MARKWELL, RD ^{[1
]}

RUSSELL, DK ^{[1
]}

JONES, AC ^{[1
]}

机构：

[1] EPICHEM LTD,WIRRAL L62 3QF,MERSEYSIDE,ENGLAND

来源：

JOURNAL OF CRYSTAL GROWTH | 1990年 / 106卷 / 2-3期

关键词：

D O I：

10.1016/0022-0248(90)90069-W

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Mixtures of vapours of trimethylamine alane and trimethylgallium have been studied using Fourier transform infrared spectroscopy and infrared laser powered homogeneous pyrolysis. The spectroscopic results confirm the existence of rapid exchange reactions, resulting in an accumulation of methyl groups on the aluminium. The pyrolysis studies indicate that the resultant gallium-hydrogen species are pyrolyzed more readily, leading to a depletion of gallium in the gas phase. These observations are related to recent results using these mixtures as precursors to deposition of AlGaAs. © 1990.

引用

页码：239 / 245

页数：7

共 17 条

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