STUDIES OF DIAMOND-LIKE CARBON-FILMS PREPARED BY ION-BEAM-ASSISTED DEPOSITION

被引:14
作者
LI, HD
HE, XM
机构
[1] Department of Materials Science and Engineering, Tsinghua University, Beijing
关键词
DIAMOND-LIKE CARBON FILMS; ION-BEAM ASSISTED DEPOSITION;
D O I
10.1007/BF02747239
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Ion beam-assisted deposition offers a novel and unique process to prepare diamond-like carbon (DLC) films at room temperature, with particularly good interface adhesion. This advantage was explored in this study to deposit highly wear-resistant coating on bearing 52100 steel. Both dual ion beam sputtering and ion beam deposition were employed. Various bombarding species and energy were investigated to optimize the process. Raman, X-ray photoelectron and Auger electron spectroscopy were used to characterize the bonding structure of DLC. Extensive experiments were carried out to examine,the tribological behaviour of the DLC/52100 system. A metal intermediate layer can help tremendously in wear resistance. The results are optimistic and may lead to useful applications.
引用
收藏
页码:1415 / 1434
页数:20
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