FORMATION AND THERMAL-STABILITY OF AMORPHOUS CU-ZR THIN-FILMS DEPOSITED BY COEVAPORATION

被引:15
作者
MINEMURA, T [1 ]
VANDENBROEK, JJ [1 ]
DAAMS, JLC [1 ]
机构
[1] PHILIPS RES LABS,5600 JA EINDHOVEN,NETHERLANDS
关键词
D O I
10.1063/1.340188
中图分类号
O59 [应用物理学];
学科分类号
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页码:4426 / 4430
页数:5
相关论文
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