PHASE-MEASURING INTERFEROMETRY - NEW METHODS AND ERROR ANALYSIS

被引:83
作者
JOENATHAN, C
机构
[1] Department of Physics and Applied Optics, Rose Hulman Institute of Technology, Terre Haute, IN, 47803
来源
APPLIED OPTICS | 1994年 / 33卷 / 19期
关键词
INTERFEROMETRY; PHASE-SHIFTING INTERFEROMETRY;
D O I
10.1364/AO.33.004147
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
New methods that can be used to determine phase in phase-stepping interferometry are presented. It is shown that a combination of some of these methods can be used to reduce the error introduced by phase-stepper miscalibration and nonlinearity. Moreover these new algorithms can also be used to detect the presence of miscalibration or phase-shifter nonlinearity. A simplified approach to understanding the error introduced by miscalibration and nonlinearity of the phase stepper and its reduction in phase shifting interferometry is also presented.
引用
收藏
页码:4147 / 4155
页数:9
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