RAMAN ANALYSIS OF LASER-ANNEALED AMORPHOUS-CARBON FILMS

被引：45

作者：

BOWDEN, M

GARDINER, DJ

SOUTHALL, JM

机构：

[1] Department of Chemical and Life Sciences, Newcastle Upon Tyne Polytechnic, Newcastle upon Tyne, NE1 8ST, Ellison Place

来源：

JOURNAL OF APPLIED PHYSICS | 1992年 / 71卷 / 01期

关键词：

D O I：

10.1063/1.350691

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Raman microline focus spectrometry (MiFS) has been used to show that hydrogen containing amorphous carbon (a-C-H) films are readily annealed by a focused argon ion (514.5 nm) laser operating at a power typical of that used for conventional Raman microscopy. The annealing process produces microcrystallites of disordered graphite localized to a 2-mu-m-diam region within the laser spot focus. Annealing threshold power densities vary from film to film, but are of the order 1500 W mm-2.

引用

页码：521 / 523

页数：3

共 11 条

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