CERAMIC SENSOR DEVICE MATERIALS

Studies on the sensitivity of the electrical resistance of ceramic sensor materials based on ZnO, TiO2 and SnO2 to humidity, acetone, ethanol, ammonia and temperature are reported. The resistance decreases by two to three orders of magnitude in the range 12 to 95% relative humidity. The humidity-sensitive materials are less sensitive to temperature and vice versa. According to the dependence of the resistance for acetone, ethanol and ammonia atmospheres, there are two types of materials: for the first type the resistance decreases in these atmospheres; in the second type it increases. The resistance changes by one to three orders of magnitude.