SPATIAL CORRELATION OF ELECTRON FIELD-EMISSION SITES WITH NON-DIAMOND CARBON CONTENT IN CVD DIAMOND

被引：12

作者：

HUMPHREYS, VL

KHACHAN, J

机构：

[1] Department Of Plasma Physics, School Of Physics, University Of Sydney, NSW

来源：

ELECTRONICS LETTERS | 1995年 / 31卷 / 12期

关键词：

DIAMOND; FIELD EMISSION;

D O I：

10.1049/el:19950698

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Field-induced electron emission is obtained from 15mm diameter CVD polycrystalline diamond films deposited on silicon wafers from a microwave discharge. These films were grown such that the percentage of non-diamond carbon is highest at the edge of the film. It was found that the majority of the emission sites also occured at the edge of the film.

引用

页码：1018 / 1019

页数：2

共 10 条

[1] WANG C., GARCIA A., INGRAM D., LAKE M., KORDESCH M.E., Cold field emission from CVD diamond films observed in emission electron microscopy, Electron. Lett, 27, pp. 1459-1461, (1991)
[2] LIU J., ZHIRNOV V.V., WOJAK G.J., MYERS A.F., CHOI W.B., HREN J.J., WOLTER S.D., MCCLURE M.T., STONER B.R., GLASS J.T., Electron emission from diamond coated silicon field emitters, Appl. Phys. Lett., 65, pp. 2842-2844, (1994)
[3] ANGUS J.C., COLLINS A.T., Electronic era exclusive, Nature, 370, (1994)
[4] XU N.S., TZENG Y., LATHAM R.V., Similarities in the ‘cold’ electron emission characteristics of diamond coated molybdenum electrodes and polished bulk graphite surfaces, J. Phys. D, Appl. Phys., 26, pp. 1776-1780, (1993)
[5] SHOVLIN J.D., KORDESCH M.E., Electron emission from chemical vapor deposited diamond and dielectric breakdown, Appl. Phys. Lett., 65, pp. 863-865, (1994)
[6] XU N.S., LATHAM R.V., TZENG Y., Field-dependence of the area density of ‘cold’ electron emission sites on broad-area CVD diamond films, Electron. Lett., 29, pp. 1596-1597, (1993)
[7] XU N.S., TZENG Y., LATHAM R.V., A diagnostic study of the field emission characteristics of individual micro-emitters in CVD diamond films, J. Phys. D, Appl Phys., 27, pp. 1988-1991, (1994)
[8] KHACHAN J., PIGOTT J.R., BRAND G.F., FALCONER I.S., James B.W., A simple microwave plasma source for diamond deposition, Rev. Sci. Instrum., 64, pp. 2971-2973, (1993)
[9] ZHU W., RANDALL C.A., BADZIAN A.R., MESSIER R., Graphite formation in diamond film deposition, J. Vac. Sci. Technol. A, 7, pp. 2315-2324, (1989)
[10] HUANG Z.-H., CUTLER P.H., MISKOVSKY N.M., SULLIVAN T.E., Theoretical study of field emission from diamond, Appl. Phys. Lett., 65, pp. 2562-2564, (1994)

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