TOWARD AN INTEGRATED ANALYSIS OF CZOCHRALSKI GROWTH

被引：46

作者：

BROWN, RA ^{[1
]}

KINNEY, TA ^{[1
]}

SACKINGER, PA ^{[1
]}

BORNSIDE, DE ^{[1
]}

机构：

[1] MIT,CTR MAT PROC,CAMBRIDGE,MA 02139

来源：

JOURNAL OF CRYSTAL GROWTH | 1989年 / 97卷 / 01期

关键词：

D O I：

10.1016/0022-0248(89)90252-2

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：99 / 115

页数：17

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