SYNTHESIS OF SUPERCONDUCTING Y-BA-CU-O THIN-FILMS BY IONIZED CLUSTER BEAM CODEPOSITION

被引:7
作者
YAMANISHI, K [1 ]
YASUNAGA, S [1 ]
KAWAGOE, Y [1 ]
SATO, K [1 ]
IMADA, K [1 ]
机构
[1] MITSUBISHI ELECT CORP,MAT & ELECTR DEVICES LAB,AMAGASAKI,HYOGO 661,JAPAN
关键词
D O I
10.1016/0168-583X(89)90329-7
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:930 / 934
页数:5
相关论文
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