METASTABLE ARGON BEAM SOURCE USING A SURFACE-WAVE SUSTAINED PLASMA

被引:10
作者
BANNISTER, ME [1 ]
CECCHI, JL [1 ]
机构
[1] PRINCETON PLASMA PHYS LAB,PRINCETON,NJ 08543
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1994年 / 12卷 / 01期
关键词
D O I
10.1116/1.578903
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A new source of metastable argon atoms in the thermal energy range is reported. The source is based on expanding a plasma sustained by electromagnetic surface waves in a quartz tube through a converging nozzle and extracting a beam from the supersonic free-expansion jet. The beam was characterized by time-of-flight measurements which yielded the absolute intensity and velocity distribution of the argon metastables. The source produced a maximum intensity of 6.2X10(14) metastables per second per steradian, the highest time-averaged intensity of thermal argon metastables of any source reported to date. A simple picture of an expanding plasma in a recombination regime is used to explain the dependence of the metastable intensity on absorbed power.
引用
收藏
页码:106 / 113
页数:8
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