METASTABLE ARGON BEAM SOURCE USING A SURFACE-WAVE SUSTAINED PLASMA

被引：10

作者：

BANNISTER, ME ^{[1
]}

CECCHI, JL ^{[1
]}

机构：

[1] PRINCETON PLASMA PHYS LAB,PRINCETON,NJ 08543

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1994年 / 12卷 / 01期

关键词：

D O I：

10.1116/1.578903

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A new source of metastable argon atoms in the thermal energy range is reported. The source is based on expanding a plasma sustained by electromagnetic surface waves in a quartz tube through a converging nozzle and extracting a beam from the supersonic free-expansion jet. The beam was characterized by time-of-flight measurements which yielded the absolute intensity and velocity distribution of the argon metastables. The source produced a maximum intensity of 6.2X10(14) metastables per second per steradian, the highest time-averaged intensity of thermal argon metastables of any source reported to date. A simple picture of an expanding plasma in a recombination regime is used to explain the dependence of the metastable intensity on absorbed power.

引用

页码：106 / 113

页数：8

共 51 条

[1] VELOCITY DISTRIBUTIONS IN MOLECULAR BEAMS FROM NOZZLE SOURCES [J].