SELECTIVELY THERMALIZED SPUTTERING FOR THE DEPOSITION OF MAGNETIC-FILMS WITH SPECIAL ANISOTROPIES

被引:16
作者
CADIEU, FJ
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期
关键词
D O I
10.1116/1.575305
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:1668 / 1674
页数:7
相关论文
共 11 条
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[5]   THE MAGNETIC-PROPERTIES OF HIGH IHC SM-CO, ND-FE-B, AND SM-TI-FE FILMS CRYSTALLIZED FROM AMORPHOUS DEPOSITS [J].
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[7]   HIGH IHC PERPENDICULAR ANISOTROPY ND-FE-B SPUTTERED FILMS [J].
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[10]   MAGNETIC-PROPERTIES OF TI STABILIZED SM (CO, FE)5 PHASES DIRECTLY SYNTHESIZED BY SELECTIVELY THERMALIZED SPUTTERING [J].
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