LOW-ENERGY ELECTRON SPECTROMETER USING CONCENTRIC HEMISPHERES AND A GRID RETARDING-FIELD

被引:31
作者
DUC, BM
JARDIN, C
GAUTHIER, JP
MICHEL, P
机构
[1] Universite Claude Bernard Lyon I, Laboratoire de Mineralogie-Cristallographie, Groupe Cristallographie et Chimie des Materiaux Associe au CNRS (ERA 600)
来源
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1979年 / 12卷 / 01期
关键词
D O I
10.1088/0022-3735/12/1/013
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
An improved low-energy electron spectrometer using concentric hemispheres with a grid retarding field is presented. Emphasis is given to the means by which a triple-cylinder electrostatic lens, with the middle potential higher than the outer potentials, can perform a preselection. This improves simultaneously the collection efficiency and the intrinsic signal-to-noise ratio of the spectrometer. The operating mode of both the input lens and hemispheres is invariable over the energy range 0-1500 eV. The comparison of Auger transition probabilities is therefore possible. The variations of the relative collection efficiency and instrumental broadening as functions of the detection energy inside the deflectors are shown on characteristic curves. Good-quality Auger spectra of molybdenum and silicon carbide are given as examples on the electron distribution curves N(E)=f(E), obtained with a very small current density (10-3 A cm-2) at relatively low primary energy (1500 eV).
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页码:43 / 46
页数:4
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