2-GUN ION-BEAM SYSTEM FOR DYNAMIC RECOIL IMPLANTATION

[1] Carter G., 1968, ION BOMBARDMENT SOLI

[2] PRODUCTION OF SOLAR CELLS BY RECOIL IMPLANTATION [J]. APPLIED PHYSICS LETTERS, 1976, 28 (09) : 491 - 494

[3] RECOIL IMPLANTATION OF MATERIALS [J]. JOURNAL OF MATERIALS SCIENCE, 1977, 12 (04) : 829 - 831

[4] EFFECTS PRODUCED BY ION BOMBARDMENT AND IMPLANTATION INTO THIN FILMS AND SURFACES [J]. NUCLEAR INSTRUMENTS & METHODS, 1971, 92 (04): : 455 - &

[5] FISCHER G, 1977, 7TH INT C AT COLL SO

[6] FISCHER GW, UNPUBLISHED

[7] MOLINE RA, 1975, P INT C ATOMIC COLLI, P159

[8] Nelson R. S., 1969, Radiation Effects, V2, P47, DOI 10.1080/00337576908235579

[9] PERKINS JG, 1970, AWRE0970 REP

[10] Shannon J. M., 1976, Applications of ion beams to materials 1975, P37

[1] Carter G., 1968, ION BOMBARDMENT SOLI

[2] PRODUCTION OF SOLAR CELLS BY RECOIL IMPLANTATION [J]. APPLIED PHYSICS LETTERS, 1976, 28 (09) : 491 - 494

[3] RECOIL IMPLANTATION OF MATERIALS [J]. JOURNAL OF MATERIALS SCIENCE, 1977, 12 (04) : 829 - 831

[4] EFFECTS PRODUCED BY ION BOMBARDMENT AND IMPLANTATION INTO THIN FILMS AND SURFACES [J]. NUCLEAR INSTRUMENTS & METHODS, 1971, 92 (04): : 455 - &

[5] FISCHER G, 1977, 7TH INT C AT COLL SO

[6] FISCHER GW, UNPUBLISHED

[7] MOLINE RA, 1975, P INT C ATOMIC COLLI, P159

[8] Nelson R. S., 1969, Radiation Effects, V2, P47, DOI 10.1080/00337576908235579

[9] PERKINS JG, 1970, AWRE0970 REP

[10] Shannon J. M., 1976, Applications of ion beams to materials 1975, P37